p122 high silicon pressure sensor die features ? high reliability, solid state silicon pressure sensors ? available in absolute pressure version ? standard pressure ranges: 1700, 3500, 17000, 21000, 35000 and 70000 kpaa ? nonlinearity < 0.25% fso bfsl ? 2x overpressure limit applications ? process control systems ? pneumatic controls ? biomedical instruments ? hydraulic systems the p122 piezoresistive pressure sensors are offered in a miniature 0.10 in x 0.10 in (2.5 mm x 2.5 mm) die. when excited with 1.0 ma, the p122 produces a millivolt output that is proportional to input pressure. the p122 is available as an absolute pressure sensor where the media pressure is referenced to an internal vacuum sealed in the die. with novasensors senstable ? process, the p122 will provide very good long-term stability and excellent repeatability. a mphenol advanced sensors
parameter value units notes general pressure range 1700 kpag 247 psi (17 bar) 3500 kpaa 508 psi (35 bar) 7000 kpaa 1015 psi (70 bar) 17200 kpaa 2495 psi (172 bar) 35000 kpaa 5076 psi (350 bar) 21000 kpaa 3046 psi (210 bar) maximum overpressure 2x rated pressure electrical @ 25c (77f) unless otherwise stated excitation 1.0 ma 10 vdc maximum input impedance 5000 20% w output impedance 5000 20% w environmental temperature range operating -40 to 257 f (-40c to 125c) storage (undiced) -67 to 302 f (-55c to 150c) mechanical weight 0.00008 lb (0.04 g) media compatibility clean dry air, non-corrosive gases performance parameters (1) value (5) units notes zero offset 50 mv 1 full scale output (fso) 240 35 mv 6, 7 linearity 0.25 %fso 2, 7 pressure hysteresis 0.05 %fso 7 temperature coeffcient 30 mv/v/c 3, 7 of zero 3, 7 temperature coeffcient of resistance 0.27 % /c 3, 7 temperature coeffcient of sensitivity -0.19 %/c 3, 7 thermal hysteresis of zero 0.2 %fso 4, 7 long term stability of fso 0.2 %fso 4 shipping and handling wafers are sawn on sticky tape with plastic rings. all sensor wafers are electrically probed and visually inspected. each wafer will be labeled with the lot, wafer, device number and the number of available sensor die. wafers are shipped in protective plastic containers. ordering information part number description 51009 1700 kpag 51013 1700 kpaa 51003 7000 kpaa 51004 17000 kpaa 51243 21000 kpaa 51005 35000 kpaa 51242 35000 kpaa 51031 70000 kpaa minimum release quantity: 2 wafers or approximately 1100 die warranty novasensor warrants its products against defects in material and workmanship for 12 months from the date of shipment. products not subjected to misuse will be repaired or replaced. novasensor reserves the right to make changes without further notice to any products herein. novasensor makes no warranty, representation or guarantee regarding the suitability of its products for any particular application. novasensor does not assume any liability arising out of the application or use of any product or circuit and specifcally disclaims, and all liability, without limitation consequential or incidental damages. the foregoing warranties are exclusive and in lieu of all other warranties, whether written, oral, implied or statutory. no implied statutory warranty of merchantability or ftness for a particular purpose shall apply. 1. 0 kpaa for absolute sensors, 0 kpag for differential or gage sensors. 2. best ft straight line. 3. typical values between 32f and 158f (0c and 70c). 4. typical value over one year. 5. all values measured a 77f (25c) and 1 ma excitation, unless otherwise noted. 6. 133 33 mv for 51009 and 51013, 285 35 mv for 51243, 270 35 mv for 51242 7. not fully tested in production. die dimensions: 0.10 in x 0.10 in x 0.07 in (2.5 mm x 2.5 mm x 1.8 mm) p122 specifcations aas-920-256b-06/2014 www.amphenol-sensors.com ? 2014 amphenol corporation. all rights reserved. specifcations are subject to change without notice. other company names and product names used in this document are the registered trademarks or trademarks of their respective owners. a mphenol advanced sensors p122 schematic diagrams -out -out -in -in +in -out +out -in -in +in
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